Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2008-07-10
2010-12-28
Booth, Richard A. (Department: 2812)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S057000
Reexamination Certificate
active
07858400
ABSTRACT:
Disclosed is a method of manufacturing a magnetic field detector having various structures that can be used as a high-density magnetic biosensor. An embodiment of the invention provides a method of manufacturing a magnetic field detector including a magnetoresistive element using a magnetic bead detecting thin film. The method includes: preparing a substrate; depositing the thin film on an upper surface of the substrate; and etching the thin film to form a ring-shaped magnetoresistive element.
REFERENCES:
patent: 5200051 (1993-04-01), Cozzette et al.
patent: 5212050 (1993-05-01), Mier et al.
patent: 5883764 (1999-03-01), Pinarbasi
patent: 6519120 (2003-02-01), Lee et al.
patent: 6689624 (2004-02-01), Doan et al.
patent: 6710984 (2004-03-01), Yuasa et al.
patent: 6784509 (2004-08-01), Yuasa et al.
patent: 6875621 (2005-04-01), Tondra
patent: 6906369 (2005-06-01), Ross et al.
patent: 6940750 (2005-09-01), Yamamoto et al.
patent: 7002839 (2006-02-01), Kawabata et al.
patent: 2005/0087000 (2005-04-01), Coehoorn et al.
patent: 2007/0063695 (2007-03-01), Ruhrig
patent: 2004-139681 (2004-05-01), None
patent: 2004-193479 (2004-07-01), None
patent: 2004-327583 (2004-11-01), None
Guanxiong Li, et al: “Detection of single micron-sized magnetic bead and magnetic nanoparticles using spin valve sensors for biological applications” Journal of Applied Physics, vol. 93, No. 10, May 15, 2003 pp. 7557-7559.
J.C. Rife, et al: “Design and performance of GMR sensors for the detection of magnetic microbeads in biosensors”, Sensors and Actuators, A, Physical, Jul. 25, 2003, pp. 209-218.
J. Schotter, et al: “Comparison of a prototype magnetoresistive biosensor to standard fluorescent DNA detection” Biosensors and Bioelectronics vol. 19, May 15, 2004, pp. 1149-1156.
H.A. Ferreira, et al: “Magnetoresistive DNA chips based on ac field focusing of magnetic labels” Journal of Applied Physics, vol. 99, Apr. 18, 2006, pp. 08P105-1˜08P105-3.
Jeong Dae Suh, et al: “Magnetic Sensors with Difference Geometry to Magnetic Nanoparticle Detection for Biosensor Application”, MRS 2007 Fall Meeting, Nov. 26-30, 2007, pp. 114.37.
Chung Myungae
Suh Jeongdae
Booth Richard A.
Electronics and Telecommunications Research Institute
Ladas & Parry LLP
LandOfFree
Method of manufacturing magnetic field detector does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of manufacturing magnetic field detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing magnetic field detector will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4185486