Method of manufacturing logic semiconductor device having non-vo

Details Method of manufacturing logic semiconductor device having non-vo Method of manufacturing logic semiconductor device having non-vo

1991-01-29

1992-10-27

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 48, 437 45, 437 52, H01L 21265, H01L 2170

Patent

active

051589028

ABSTRACT:
The present invention discloses a logic semiconductor device having a non-volatile memory in which a memory cell portion and a logic circuit portion are formed on a single semiconductor substrate, and a floating gate of the memory cell portion and a gate of the logic circuit portion are made of different materials, and a method of manufacturing the same.

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