Method of manufacturing liquid jet head, method of...

Details Method of manufacturing liquid jet head, method of... Method of manufacturing liquid jet head, method of...

2011-08-09

2011-08-09

Feggins, K. (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C029S025350, C438S050000

Reexamination Certificate

active

07992972

ABSTRACT:
A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.

REFERENCES:
patent: 6884649 (2005-04-01), Kobayashi et al.
patent: 7399067 (2008-07-01), Kubota et al.
patent: 7475967 (2009-01-01), Nakagawa et al.
patent: 2002/0084718 (2002-07-01), Nakagawa et al.
patent: 2003-298136 (2003-10-01), None
patent: 2004-111851 (2004-04-01), None
patent: 2008-016586 (2008-01-01), None

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