Method of manufacturing liquid ejection head

Details Method of manufacturing liquid ejection head Method of manufacturing liquid ejection head

2006-02-28

2008-08-05

Deo, Duy-Vu N (Department: 1792)

Metal working

Piezoelectric device making

C029S025420, C029S025410, C310S311000, C310S328000, C310S329000, C310S330000

Reexamination Certificate

active

07406757

ABSTRACT:
The method manufactures a liquid ejection head comprising: a plurality of nozzles which eject liquid; a plurality of pressure chambers which are connected to the nozzles, respectively; a diaphragm which forms wall faces of the pressure chambers; and piezoelectric elements which are disposed on the diaphragm at positions corresponding to the pressure chambers and each are formed of at least a piezoelectric material and electrodes overlapping each other. The method comprises the steps of: forming a lower electrode on a whole surface of a substrate that is to form the diaphragm; then forming piezoelectric material by screen printing onto a whole surface of the lower electrode; then forming an upper electrode on a whole surface of the piezoelectric material; then forming a mask having a prescribed pattern on the upper electrode; then dividing the piezoelectric material and the upper electrode by performing a sandblasting process through the mask; and then calcining the substrate together with the divided piezoelectric material and upper electrode.

REFERENCES:
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patent: 2002/0071008 (2002-06-01), Hashizume et al.
patent: 2006/0066176 (2006-03-01), Nanataki et al.
patent: 11-207970 (1999-03-01), None
patent: 02000103067 (2000-04-01), None
patent: 2003-69106 (2003-03-01), None

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