Method of manufacturing liquid delivery apparatus

Metal working – Piezoelectric device making

Reexamination Certificate

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Details

C029S890100, C029S412000, C347S071000, C347S072000, C310S328000, C310S331000

Reexamination Certificate

active

10876706

ABSTRACT:
A method of manufacturing a liquid delivery apparatus comprising: a plurality of pressure chambers accommodating a liquid; nozzles communicating with the respective chambers; and a plurality of piezoelectric ceramic sheets disposed at respective positions corresponding to the chambers, the apparatus being configured to deliver the liquid to the outside from selected one of the nozzles by deforming the corresponding ceramic sheet to pressurize the liquid in the corresponding chamber, the method comprising steps of: providing a fluid-passage-unit forming member which forms at least a part of a fluid passage unit; laminating a green sheet to be eventually formed into the ceramic sheets on a jig substrate; segmenting the green sheet into a plurality of segments; firing the segments obtained by the segmenting step into the ceramic sheets; and fixing at least predetermined ones of the ceramic sheets acquired by the firing step to the fluid-passage-unit forming member.

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Fuda et al., “Ceramic Actuator with Three-Dimensional Electrode Structure”, Proceedings of the Eighth IEEE Symposium on Applications of Ferroelectrics, 1992, pp. 573-576, May 1992.

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