Method of manufacturing liquid crystal display including active

Details Method of manufacturing liquid crystal display including active Method of manufacturing liquid crystal display including active

1997-09-29

1999-11-09

Sikes, William L.

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

349 46, G02F 11333

Patent

active

059824670

ABSTRACT:
A method for manufacturing a liquid crystal display includes the steps of forming a gate bus line on a substrate by using a first metal, forming a gate electrode, a second gate bus line and a gate pad on the substrate, by using a second metal, forming a gate insulating layer on the substrate including the gate bus line, the gate electrode, the gate pad and the second gate bus line, by using a first insulating material, selectively forming a semiconductor layer and an impure semiconductor layer on the gate insulating layer, forming a source electrode, a drain electrode, a source bus line and a source pad on the substrate including the impure semiconductor layer, by using a third metal, removing a portion of the impure semiconductor layer exposed between the source electrode and the drain electrode by etching, using the source electrode and the drain electrode as masks, forming a protection layer on the substrate including the source electrode and the drain electrode, by using a second insulating material, forming a drain contact hole on the drain electrode, a source pad contact hole on the source pad and a gate pad contact hole on the gate pad, and forming a pixel electrode on the substrate having the protection layer, using a conductive material.

REFERENCES:
patent: 5055899 (1991-10-01), Wakai et al.
patent: 5334860 (1994-08-01), Naito
patent: 5731856 (1998-03-01), Kim et al.

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