Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1996-06-13
1998-07-07
Chapman, Mark
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430 6, G03F 900
Patent
active
057766363
ABSTRACT:
The present invention includes the steps of forming a stamper with a fine and delicate relief pattern formed thereon by forming a photo resist layer on a flat substrate, exposing the photo resist, developing the exposed photo resist, metallizing and electroforming the surface of the photo resist, and of injection molding the light-transmitting plate using said stamper.
REFERENCES:
patent: 5384658 (1995-01-01), Ohtake et al.
Kunisawa Toshitaka
Shinji Osamu
Yasuda Kouzo
Yoshikawa Toshiyuki
Chapman Mark
Kuraray Co. Ltd.
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