Method of manufacturing laminated piezoelectric actuator having

Details Method of manufacturing laminated piezoelectric actuator having Method of manufacturing laminated piezoelectric actuator having

1994-12-20

1996-10-29

Hughes, S. Thomas

Metal working

Piezoelectric device making

204479, 204485, 310340, 310366, H04R 1700

Patent

active

055686796

ABSTRACT:
After forming a cavity in a laminated body of a plurality of piezoelectric ceramic films and internal electrodes, an insulator is formed on the end faces of the internal electrodes exposed on the wall surface of the cavity by electrophoretic process. According to this method, an insulator can be formed more inexpensively, in larger quantity, and with higher reliability than by the conventional method using a low pressure CVD method.

REFERENCES:
patent: 4681667 (1992-07-01), Utsumi et al.
patent: 5163209 (1992-11-01), Harida et al.
patent: 5191688 (1993-03-01), Takizawa et al.
patent: 5254212 (1993-10-01), Someji et al.

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