Method of manufacturing high-purity silicon rods having a unifor

Details Method of manufacturing high-purity silicon rods having a unifor Method of manufacturing high-purity silicon rods having a unifor

1978-03-02

1979-04-03

Silverberg, Sam

Coating processes

Electrical product produced

Welding electrode

264 81, 156611, 427 86, 423349, 423350, 118 495, B05D 512

Patent

active

041478142

ABSTRACT:
A method of manufacturing high-purity silicon rods having a uniform sectional shape by thermally decomposing monosilane on a plurality of rod-shaped silicon carrier members which have been red-heated by directly passing an electric current therethrough, said silicon carrier members being thermally insulated from one another, characterized in that monosilane is supplied into a pyrolysis container through multi-stage monosilane supply ports located in parallel with the axes of said silicon carrier members held vertically within the pyrolysis container, and that the amount of supply of monosilane through the upper supply ports is increased as compared with that through the lower supply ports in response to the increase of the diameter of each of said silicon rods.

REFERENCES:
patent: 3011877 (1961-12-01), Schweickert
patent: 3053638 (1962-09-01), Reiser
patent: 3099534 (1963-07-01), Schweickert
patent: 3147141 (1964-09-01), Ishizuka
patent: 3941906 (1976-03-01), Stut

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