Fishing – trapping – and vermin destroying
Patent
1996-08-30
1998-07-28
Niebling, John
Fishing, trapping, and vermin destroying
437 59, 437186, 148DIG50, 148DIG124, H01L 21265
Patent
active
057862222
ABSTRACT:
A BiCMOS manufacturing process for fabricating an emitter of a bipolar transistor includes the steps of forming footings on a silicon substrate for prospectively bearing edges of the emitter, forming a polysilicon emitter having a medial portion overlying the silicon substrate and lateral edges on the footings, removing the footings leaving notches at the lateral edges of the polysilicon emitter and refilling the notches with a thin polysilicon film. The bipolar transistor in a BiCMOS integrated circuit resulting from this process includes a silicon semiconductor substrate having a substantially flat surface, a field oxide film laterally bounding the silicon semiconductor substrate and a polysilicon emitter abutting the flat surface of the silicon semiconductor substrate.
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Koestner Ken J.
National Semiconductor Corporation
Niebling John
Pham Long
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