Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2006-04-11
2006-04-11
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S082000
Reexamination Certificate
active
07026187
ABSTRACT:
A method of employing organic vapor phase deposition to fabricate a polycrystalline organic thin film is described. By employing organic vapor phase deposition at moderate deposition chamber pressures and substrate temperatures, a polycrystalline organic thin film results having significantly larger purity and grain size than what is achievable by vacuum thermal evaporation. These polycrystalline organic thin films may be employed in a variety of applications, including, for example, organic light emitting devices, photovoltaic cells, photodetectors, lasers, and thin film transistors.
REFERENCES:
patent: 4269682 (1981-05-01), Yano et al.
patent: 5213675 (1993-05-01), Yamaguchi et al.
patent: 5402748 (1995-04-01), Takai et al.
patent: 5468519 (1995-11-01), Akiyama et al.
patent: 5554220 (1996-09-01), Forrest et al.
patent: 5736073 (1998-04-01), Wadley et al.
patent: 5953828 (1999-09-01), Hillman
patent: 6207239 (2001-03-01), Affinito
patent: 6232157 (2001-05-01), Dodabalapur et al.
patent: 6265243 (2001-07-01), Katz et al.
patent: 6278127 (2001-08-01), Dodabalapur et al.
patent: 6326640 (2001-12-01), Shi et al.
patent: 6337102 (2002-01-01), Forrest et al.
patent: 6664137 (2003-12-01), Weaver
patent: 2003/0056720 (2003-03-01), Dauelsberg et al.
S.R. Forrest, “Ultrathin Organic films grown by organic molecular beam deposition and related techniques”,Chem. Rev. vol. 97, No. 6, pp. 1793-1896 (Sep./Oct. 1997).
M. A. Baldo, et al., “Organic Vapor Phase Deposition”,Adv. Mater. 10, No. 18, pp. 1505-1514 (1998).
P. E. Burrows, et al., “Organic Vapor Phase Deposition: a new method for the growth of organic thin films with large optical non-linearities”,J. Cryst. Growth156, pp. 91-98 (1995).
K. M. Vaeth, et al., “Chemical vapor deposition of poly (p-phenylene vinylene) based light emitting diodes with low turn-on voltages”,Appl. Phys. Lett. 71 (15), pp. 2091-2093 (Oct. 13, 1997).
M. A. Baldo, et al., “Low pressure organic vapor phase deposition of small molecular weight organic light emitting device structures”,Appl. Phys. Lett. 71(21), pp. 3033-3035 (Nov. 24, 1997).
M. Shtein, et al., “Material transport regimes and mechanisms for growth of molecular organic thin films using low-pressure organic vapor phase deposition”,J. Appl. Phys. 89:2, pp. 1470-1476 (Jan. 15, 2001).
G. Horowitz,J. Mater. Chem., 9, pp. 2021-2026 (1999).
A.R. Brown, et al., “Field-effect transistors made from solution-processed organic semiconductors”,Synth. Met. 88, pp. 37-55 (1997).
C.D. Dimitrakopoulos, et al., “Molecular beam deposited thin films of pentacene for organic field effect transistor applications”,J. of Appl. Phys. 80(4), pp. 2501-2508 (Aug. 15, 1996).
D.J. Gundlach, et al., “Pentacene organic thin-film transistors- molecular ordering and mobility”,IEEE El. Dev. Lettvol. 18, No. 3, pp. 87-89 (Mar. 3, 1997).
J.H. Schön, et al., “Ambipolar pentacene field-effect transistors and inverters”,Science287 pp. 1022-1023 (Feb. 11, 2000).
J.H. Schön, et al., “On the intrinsic limits of pentacene field-effect transistors”,Organic Electronics1, pp. 57-64, (2000).
Y.Y. Lin, et al., “Pentacene-based organic thin-film transistors”,IEEE Trans. On El. Dev. vol. 44, No. 8, pp. 1325-1331 (Aug. 8, 1997).
D.J. Gundlach, et al., “High-mobility, low voltage organic thin film transistors”,International Electron Devices-Meeting Technical Digest, Dec. 1999, pp. 111-114.
Ch. Kloc, et al., “Physical vapor growth of centimeter-sized crystals of α-hexathiophene”,J. of Crystal Growth182, pp. 416-427 (1997).
J.H. Schön, et al., “An organic solid state injection laser”,Science289, pp. 599-601 (Jul. 28, 2000).
J.H. Schö{umlaut over ( )}n, et al., “Electrical properties of single crystals of rigid rodlike conjugated molecules”,Phys. Rev. B58, No. 19, pp. 12952-12957 (Nov. 15, 1998).
S.F. Nelson, et al., “Temperature-independent transport in high-mobility pentacene transistors”,Appl. Phys. Lett. vol. 72, No. 15, pp. 1854-1856 (Apr. 13, 1998).
G. Horowitz, et al., “Mobility in Polycrystalline Oligothiophene Field-effect transistors dependent on grain size”,Adv. Mater. 2000, 12, No. 14, pp. 1046-1050 (Jul. 19, 2000).
T.N. Jackson, et al., “Organic thin-film transistors for organic light-emitting flat-panel display backplanes”,IEEE J. of Sel. Topics in Quant. Electr. vol. 4, No. 1, pp. 100-104 (Jan./Feb. 1998).
I.P.M. Bouchoms, et al., “Morphology identification of the thin film phases of vacuum evaporated pentacene on SIO2 substrates”,Synth. Met. 104, pp. 175-178 (1999).
C. D. Dimitrakopoulos, et al., “Organic thin-film transistors: a review of recent advances”,IBM J. Res.&Dev. vol. 45, No. 1, pp. 11-27 (Jan. 2001).
Forrest Stephen R.
Shtein Max
Isaac Stanetta
Kenyon & Kenyon
Niebling John F.
The Trustees of Princeton University
LandOfFree
Method of manufacturing high-mobility organic thin films... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of manufacturing high-mobility organic thin films..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing high-mobility organic thin films... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3569042