Method of manufacturing glass substrate for data recording...

Details Method of manufacturing glass substrate for data recording... Method of manufacturing glass substrate for data recording...

2005-02-08

2005-02-08

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S041000

Reexamination Certificate

active

06852003

ABSTRACT:
A glass substrate for a data recording medium is manufactured by using a tabular carrier with circular holes formed therein, housing disk-shaped glass workpieces in the circular holes of this carrier, sliding polishing pads over the surface of the carrier and the principal surfaces of the glass workpieces and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces of the glass workpieces is reduced to a predetermined value or less. The height (NRa) of micro-waviness of the principal surfaces is a value dependent on the surface roughness of the polishing pad and the surface roughness of this polishing pad is a value dependent on the surface roughness of the carrier. A glass substrate for a data recording medium is manufactured by reducing the surface roughness (Ra) of the carrier to 0.08 μm or less and polishing the glass workpieces until the height (NRa) of micro-waviness on the principal surfaces measured using a three-dimensional surface structure analysis microscope whose measuring wavelength (λ) is set to 0.2 to 1.4 mm is reduced to 0.12 nm or less.

REFERENCES:
patent: 6537648 (2003-03-01), Takahashi et al.
patent: 6686023 (2004-02-01), Takahashi et al.
patent: 20030077982 (2003-04-01), Takizawa
patent: 20040180611 (2004-09-01), Tajima et al.
patent: 2002-092867 (2002-03-01), None

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