Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1982-11-19
1984-08-28
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427163, B05D 306, C23C 1100
Patent
active
044684134
ABSTRACT:
Doped silica glass can be manufactured by reacting gaseous vapors of silica-forming compounds and dopant-forming compounds. Increased fluorine dopant can be provided with less fluorine dopant-forming compound, when the fluorine dopant-forming compound is hexafluoroethane (C.sub.2 F.sub.6).
REFERENCES:
patent: Re30635 (1981-06-01), Kuppers et al.
patent: 4045198 (1977-08-01), Rau et al.
patent: 4221825 (1980-09-01), Guerder et al.
Abe, K., "Fluorine Doped Silica for Optical Waveguides," 2nd ECOC, IEE, Paris, 1976.
Ainslie, G. J., et al., "Preparation of Long Lengths of Ultra-Low-Loss Single-Mode Fibre," Electronics Letters, vol. 15, No. 14, pp. 411-413, (Jul. 1979).
Fleming, J. W., et al., "Low-Loss Single-Mode Fibers Prepared by Plasma-Enhanced MCVD," Electronics Letters, vol. 17, No. 23, pp. 867-868, (Nov. 1981).
Geittner, T., et al., "Low-Loss Optical Fibers Prepared by Plasma-Activated Chemical Vapor Deposition (CVD)," Applied Physics Letters, vol. 28, No. 11, pp. 645-646, (1976).
Kuppers, D., et al., "Application of the Plasma-Activated Chemical Vapour Deposition (PCVD) Process to the Preparation of Fluorine Doped Fibres," Third ECOC, Munich, 1977.
Kuppers, D., et al., "Deposition of Fluorine-Doped Silica Layers from a SiCl.sub.4 /SiF.sub.4 /O.sub.2 Gas Mixture by the Plasma-CVD Method," Journal of the Electrochemical Society: Solid-State Science and Technology, vol. 125, No. 8, pp. 1298-1302, (Aug. 1978).
Muhlich, A., et al., "A New Doped Synthetic Fused Silica as Bulk Material for Low-Loss Optical Fibres," First ECOC, IEE, London, 1975.
Muhlich, A., et al., "Preparation of Fluorine-Doped Silica Preforms by Plasma Chemical Technique," Third ECOC, Munich, 1977.
Rau, K., et al., "Progress in Silica Fibers with Fluorine Dopant," Topical Meeting on Fiber Transmission, IEEE, Williamsburg, 1977.
Morgenstern Norman
Schechter Marc D.
U.S. Philips Corporation
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