Method of manufacturing electronic device including aligning...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S832000, C029S830000, C029S840000, C029S739000, C029S740000, C029S712000, C430S005000, C430S126200, C430S311000, C356S399000, C356S400000, C356S401000, C250S548000

Reexamination Certificate

active

07127810

ABSTRACT:
A method of manufacturing an electronic device includes providing a mask substrate, a first substrate on which an object to be transferred is formed, and a second substrate to which the object is to be transferred, adjusting positions of the mask substrate, the first substrate and the second substrate so that an alignment mark formed on one of the substrates (a reference substrate) and alignment marks formed on other two of the substrates are aligned with each other, and transferring the object to be transferred from the first substrate to the second substrate, the transferring step including irradiating the object to be transferred from the first substrate with light transmitted through the mask substrate.

REFERENCES:
patent: 3264105 (1966-08-01), Houtz, Jr.
patent: 5170058 (1992-12-01), Berasi et al.
patent: A-11-142878 (1999-05-01), None
patent: WO 02/06902 (2002-01-01), None
patent: WO 02/08835 (2002-01-01), None

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