Method of manufacturing electron-emitting device, electron sourc

Electric lamp or space discharge component or device manufacturi – Process

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445 51, H01J 902, H01J 130

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058533109

ABSTRACT:
A method of manufacturing an electron-emitting device includes providing a pair of electrodes and an electroconductive thin film arranged between the electrodes. The method also includes a step of forming an electron-emitting region in the electroconductive film by the steps of partially modifying the composition of the electroconductive thin film with a chemical change to make a region of the electroconductive thin film have a higher resistivity than a resistivity in other regions, and causing an electric current to run through the electroconductive thin film to form the electron-emitting region in the region having the higher resistivity.

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