Method of manufacturing electron emission source

Details Method of manufacturing electron emission source Method of manufacturing electron emission source

2008-07-15

2008-07-15

Williams, Joseph L (Department: 2889)

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

C445S051000

Reexamination Certificate

active

07399214

ABSTRACT:
The step of forming an opening in an insulating layer to expose a carbon nanotube layer is performed using two types of dry etching different from each other in conditions. In the first-stage dry etching step, a hole is formed in the insulating layer to such a depth as not exposing the carbon nanotube layer. Thereafter, in the second-stage dry etching step, a bottom surface portion of the hole is removed, thus exposing an upper surface of the carbon nanotube layer. A method of manufacturing an electron emission source capable of improving performance of an electron emission portion is thus obtained.

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