Etching a substrate: processes – Forming or treating electrical conductor article
Reexamination Certificate
2007-03-20
2007-03-20
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Forming or treating electrical conductor article
C216S066000
Reexamination Certificate
active
10796628
ABSTRACT:
Provided are a distributed analog phase shifter and a method of manufacturing the same, which reduce a change in a characteristic impedance while changing a phase velocity with respect to an applied voltage. In the distributed analog phase shifter, a coplanar waveguide (CPW) is formed in a line form on a substrate. A plurality of ferroelectric capacitors is periodically loaded to the CPW. The ferroelectric capacitors include a ferroelectric film in a pattern form and defines the ferroelectric film affected by the applied voltage within an area of the ferroelectric capacitors. Accordingly, the change in the phase velocity with respect to the applied voltage is maintained without the change of the CPW characteristic and a return loss characteristic and a total insertion loss are improved since a total dielectric loss of the ferroelectric film is decreased.
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Kim Young Tae
Kwak Min Hwan
Lee Sang Seok
Lee Su Jae
Moon Seungeon
Blakely & Sokoloff, Taylor & Zafman
Electronics and Telecommunications Research Institute
Olsen Allan
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