Coating processes – Electrical product produced – Piezoelectric properties
Reexamination Certificate
2004-11-29
2009-08-25
Talbot, Brian K (Department: 1792)
Coating processes
Electrical product produced
Piezoelectric properties
C427S379000, C427S384000, C029S025350
Reexamination Certificate
active
07579041
ABSTRACT:
A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
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Kazama Hironobu
Kuriki Akira
Shinbo Toshinao
Sumi Koji
Seiko Epson Corporation
Sughrue & Mion, PLLC
Talbot Brian K
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