Method of manufacturing dielectric layer and method of...

Details Method of manufacturing dielectric layer and method of... Method of manufacturing dielectric layer and method of...

2011-08-23

2011-08-23

Talbot, Brian K (Department: 1715)

Coating processes

Electrical product produced

Piezoelectric properties

C427S379000, C029S025350

Reexamination Certificate

active

08003161

ABSTRACT:
A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.

REFERENCES:
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patent: 6103072 (2000-08-01), Nishiwaki et al.
patent: 1 369 501 (2003-12-01), None
patent: 1369501 (2003-12-01), None
patent: 9-223830 (1997-08-01), None
patent: 2003-338607 (2003-11-01), None

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