Method of manufacturing diamond substrates

Details Method of manufacturing diamond substrates Method of manufacturing diamond substrates

2004-07-26

2010-11-23

Olsen, Allan (Department: 1716)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

C117S929000

Reexamination Certificate

active

07837793

ABSTRACT:
A tiled array of diamond plates, which is suitable for wafer scale processing, for example, in the manufacture of electronic or other device structures on the diamond plates. The diamond plates are fixed to a support layer, preferably a polycrystalline diamond support layer, in a substantially planar arrangement such that at least one of the major surfaces of the respective fixed diamond plates defines a fabrication surface that is exposed for further processing. The support layer may be a backing layer, in which case only one of the major faces of the diamond substrate is exposed for further processing, or may extend between respective diamond substrates such that both major surfaces are exposed for further processing.

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