Fishing – trapping – and vermin destroying
Patent
1988-11-18
1991-01-08
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
148DIG46, 148DIG51, 148DIG84, 148DIG160, 357 16, 437 25, 437133, 437225, 437930, 437936, H01L 2120, H01L 21265
Patent
active
049835408
ABSTRACT:
An ion beam (113) focused into a diameter of at most 0.1 .mu.m bombards substantially perpendicularly to the superlattice layers of a one-dimensional superlattice structure and is scanned rectilinearly in a direction of the superlattice layers so as to form at least two parallel grooves (108, 109, 110, 111) or at least two parallel impurity-implanted parts (2109) as potential barrier layers, whereby a device of two-dimensional superlattice structure can be manufactured. At least two parallel grooves (114, 115, 116, 117) or impurity-implanted parts are further formed orthogonally to the potential barrier layers of the two-dimensional superlattice structure, whereby a device of three-dimensional superlattice structure can be manufactured. In addition, deposition parts (2403, 2404, 2405) may well be provided by further depositing an insulator into the grooves (108, 109, 110, 111, 114, 115, 116, 117) which are formed by the scanning of the ion beam. Owing to these expedients, the portions of the two-dimensional and three-dimensional superlattice structures can be manufactured with ease and at high precision.
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Ichiguchi Tsuneo
Ishida Koji
Ishitani Tohru
Itoh Fumikazu
Saito Keiya
Bunch William
Chaudhuri Olik
Hitachi , Ltd.
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