Method of manufacturing circuit board

Metal fusion bonding – Process – Metal to nonmetal with separate metallic filler

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228124, 228203, 228219, 22826312, 29846, H05K 300, H05K 302

Patent

active

051763095

ABSTRACT:
According to this invention, there is provided a method of manufacturing a highly reliable circuit board in which a copper member is strongly, directly bonded to a substrate made of an aluminum nitride sintered body, thereby obtaining high peel strength. The method of manufacturing the circuit board includes the steps of bringing a copper member containing 100 to 1,000 ppm of oxygen into contact with an oxide layer having a thickness of 0.1 to 5 .mu.m formed on a surface of a substrate made of an aluminum nitride sintered body, and heating the substrate in an inert gas atmosphere containing 1 to 100 ppm of oxygen at a temperature not more than a temperature corresponding to a liquidus including a pure copper melting point of a hypoeutectic region of a two-component phase diagram of Cu-Cu.sub.2 O and not less than a temperature corresponding to a eutectic line obtained by connecting a line corresponding to copper and a line corresponding to a cuporus oxide composition, and directly bonding the copper member to the substrate.

REFERENCES:
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patent: 3994430 (1976-11-01), Cusano et al.
patent: 4129243 (1978-12-01), Cusano et al.
patent: 4505418 (1985-03-01), Neidig et al.
patent: 4693409 (1987-09-01), Mizunoya et al.
patent: 4849292 (1989-07-01), Mizunoya et al.

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