Method of manufacturing ceramic film and structure including...

Details Method of manufacturing ceramic film and structure including... Method of manufacturing ceramic film and structure including...

2005-12-06

2009-06-09

Kunemund, Robert M (Department: 1792)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from solid or gel state

Organic product

C117S007000, C117S008000, C117S009000, C117S944000

Reexamination Certificate

active

07544244

ABSTRACT:
A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.

REFERENCES:
patent: 2002/0015797 (2002-02-01), Hunt et al.
patent: 2005/0019551 (2005-01-01), Hunt et al.
patent: 2007/0122610 (2007-05-01), Hatono et al.
patent: 4-188503 (1992-07-01), None
patent: 2004-43893 (2004-02-01), None

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