Method of manufacturing capacitors integrated in microelectronic

Chemistry: electrical and wave energy – Processes and products

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204 42, C25D 1104, C25D 1112

Patent

active

044500483

ABSTRACT:
A method of manufacturing MOM capacitors, the dielectric and the lateral insulation of which are formed by islands and by vertical partition walls, respectively, obtained by local anodic oxidation of one of the plates of said capacitors. The islands and the vertical partition walls are formed from cavities provided in the plates of the said capacitors.

REFERENCES:
patent: 3461347 (1969-08-01), Temelson
patent: 3785937 (1974-01-01), McMahon
patent: 3864217 (1975-02-01), Takahata
patent: 4157610 (1979-06-01), Kamei

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