Method of manufacturing cantilever drive mechanism and probe dri

Fishing – trapping – and vermin destroying

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437225, 437901, 437921, 148DIG159, 216 11, H01L 21465

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active

056483007

ABSTRACT:
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.

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