Fishing – trapping – and vermin destroying
Patent
1994-11-18
1997-07-15
Niebling, John
Fishing, trapping, and vermin destroying
437225, 437901, 437921, 148DIG159, 216 11, H01L 21465
Patent
active
056483007
ABSTRACT:
A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.
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Kawasaki Takehiko
Nakayama Masaru
Shimada Yasuhiro
Suzuki Yoshio
Takamatsu Osamu
Canon Kabushiki Kaisha
Niebling John
Pham Long
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