Method of manufacturing avalanche photo diode

Fishing – trapping – and vermin destroying

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357 13, 357 30, 437 5, H01L 3118

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047613831

ABSTRACT:
An avalanche photo diode in which the guard ring portion and the front of the pn junction of the light receiving portion are formed at the same depth from the surface of an InP layer, so that the guard ring performs its desired function.

REFERENCES:
patent: 4125415 (1978-11-01), Clark
patent: 4153904 (1979-05-01), Tasch et al.
patent: 4481523 (1984-11-01), Osaka et al.
patent: 4651187 (1987-03-01), Sugimoto et al.
Nishida et al, "InGaAsP Heterostructure . . . Gain", Appl. Phys. Lettr., 35(3), Aug. 1, 79, pp. 251-253.
Shirai et al, "1.3 .mu.m InP/InGaAsP . . . Photodiodes", Elect. Lettr. Oct. 29, 1981, vol. 17, No. 22, pp. 826-827.
Teguchi et al, "InP-InGaAsP . . . Effect", Elect. Lettr., Jul. 19, 1979, vol. 15, No. 15, pp. 453-455.

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