Glass manufacturing – Processes – Forming product or preform from molten glass
Reexamination Certificate
2011-03-08
2011-03-08
Peng, Charlie (Department: 2883)
Glass manufacturing
Processes
Forming product or preform from molten glass
C065S385000
Reexamination Certificate
active
07900478
ABSTRACT:
The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of light in an optical system. In an embodiment, the optic is manufactured by disposing a pattern on a surface of a reticle. The pattern is covered with a first protective coating to protect the pattern. Individual optics are cut from the reticle so that each optic includes a portion of the pattern. The optic is thinned by removing material until it has an axial thickness of less than 1,000 microns. The optic is cleaned after thinning and covered with an anti-reflective coating.
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English Abstract for Japanese Publication No. JP 2004-529393T published Sep. 24, 2004, 1 pg.
ASML Holding N.V.
Peng Charlie
Sterne, Kessler, Goldstein & Fox P.L.L.C
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