Method of manufacturing an optical device with a groove accurate

Details Method of manufacturing an optical device with a groove accurate Method of manufacturing an optical device with a groove accurate

1997-01-10

1999-10-05

Hoffmann, John

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

Process of manufacturing optical fibers, waveguides, or...

65407, C03B 804

Patent

active

059616830

ABSTRACT:
A first layer (2) and a second layer (3) are formed on a substrate (1). The first layer is made of a resist against a groove-sculpturing etchant used in etching the substrate while the second layer is made of an anti-corrosive material against dry etching. The second layer is at first patterned into a patterned second layer (3a) in the form of a groove-sculpturing mask pattern (8). With the patterned second layer used as a mask, the first layer is etched and patterned into a patterned first layer (2a) in the form of the above-mentioned mask pattern. With the patterned first layer used as a mask, the substrate is etched to form a groove (9).

REFERENCES:
patent: 5355386 (1994-10-01), Rothman
patent: 5471552 (1995-11-01), Wuu
patent: 5481629 (1996-01-01), Tabuchi
patent: 5499732 (1996-03-01), Nishimoto
patent: 5548673 (1996-08-01), Kitamura
patent: 5557695 (1996-09-01), Yamane
patent: 5579424 (1996-11-01), Schneider
patent: 5644667 (1997-07-01), Tabuchi

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