Method of manufacturing an integrated optical component comprisi

Details Method of manufacturing an integrated optical component comprisi Method of manufacturing an integrated optical component comprisi

1998-09-08

2000-03-21

Utech, Benjamin

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

385 50, 385129, 385130, H01L 2102, H01L 2120, H01L 213065, G02B 613, G02B 6136

Patent

active

060402466

ABSTRACT:
To form an integrated optical component comprising a thick waveguide coupled to a thin waveguide, the method consists in:
depositing a first guiding layer of said thick waveguide on a substrate;
locally etching said first guiding layer over a portion allocated both to a coupling interface and to the thin waveguide;
depositing a second guiding layer on the first guiding layer and on the locally etched portion so as to form said thick waveguide in a manner such that it has a maximum thickness in a first zone, a graded-thickness section in a second zone, and a reduced-thickness section in a third zone;
locally etching the second guiding layer over a portion of the third zone, said portion being allocated to the thin waveguide; and
depositing a third guiding layer in said portion of said third zone so as to form said thin waveguide.

REFERENCES:
patent: 3948583 (1976-04-01), Tien
patent: 4820655 (1989-04-01), Noda et al.
patent: 5332690 (1994-07-01), Cho et al.
patent: 5379359 (1995-01-01), Gupta
patent: 5472907 (1995-12-01), Binsma et al.
patent: 5568579 (1996-10-01), Okaniwa
Patent Abstracts of Japan, vol. 097, No. 010, Oct. 31, 1997 corresponding to JP 09 152528 A (Sharp Corp) dated Jun. 10, 1997.
Patent Abstracts of Japan, vol. 095, No. 005, Jun. 30, 1995, corresponding to JP 07 043552 A (Hitachi Cable Ltd) Feb. 14, 1995.
Patent Abstracts of Japan, vol. 097, No. 006, Jun. 30, 1997, corresponding to JP 09 036487 A (Fujitsu Ltd), Feb. 7, 1997.
Patent Abstracts of Japan, vol. 006, No. 229 (P-155) Nov. 16, 1982 corresponding to JP 57 132105 A (Nippon Denki KK) Aug. 16, 1982.

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