Method of manufacturing an integrated circuit using chemical mec

Details Method of manufacturing an integrated circuit using chemical mec Method of manufacturing an integrated circuit using chemical mec

1997-12-01

1999-10-19

Scherbel, David A.

Abrading

Machine

Rotary tool

451364, 451398, B24B 500, B24B 2900

Patent

active

059678852

ABSTRACT:
A method of manufacturing integrated circuits using a carrier fixture. The carrier fixture does not include transport channels or openings for directing a slurry to a substrate being polished and, as a result, damage to the substrate is reduced because the edges adjacent to the substrate are eliminated. The present invention further provides a carrier fixture having an inner support coupled to a ring member that contacts a substrate during the CMP process. The present invention also provides a carrier fixture having inner and outer supports coupled to a ring member.

REFERENCES:
patent: 3374582 (1968-03-01), Boettcher
patent: 3627338 (1971-12-01), Thompson
patent: 3842544 (1974-10-01), Paola
patent: 4711610 (1987-12-01), Riehl
patent: 5036630 (1991-08-01), Kaanta et al.
patent: 5394655 (1995-03-01), Allen et al.
patent: 5597346 (1997-01-01), Hempel, Jr.
patent: 5695392 (1997-12-01), Kim
patent: 5795215 (1998-08-01), Guthrie et al.

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