Method of manufacturing an ink jet recording head having...

Details Method of manufacturing an ink jet recording head having... Method of manufacturing an ink jet recording head having...

2007-08-24

2010-11-09

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C029S846000, C216S062000, C216S067000

Reexamination Certificate

active

07827659

ABSTRACT:
A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.

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Machine Language Translation of JP 5-177831.

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