Metal working – Piezoelectric device making
Reissue Patent
2007-01-23
2007-01-23
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S890100, C347S070000
Reissue Patent
active
10319491
ABSTRACT:
delete-start id="DEL-S-00001" date="20070123" ?Andelete-end id="DEL-S-00001" ?insert-start id="INS-S-00001" date="20070123" ?A method of manufacturing aninsert-end id="INS-S-00001" ?ink-jet recording headdelete-start id="DEL-S-00002" date="20070123" ?comprising:delete-end id="DEL-S-00002" ?insert-start id="INS-S-00002" date="20070123" ?which includesinsert-end id="INS-S-00002" ?an elastic sheetdelete-start id="DEL-S-00003" date="20070123" ?providingdelete-end id="DEL-S-00003" ?insert-start id="INS-S-00003" date="20070123" ?facinginsert-end id="INS-S-00003" ?pressure generating chambersdelete-start id="DEL-S-00004" date="20070123" ?;delete-end id="DEL-S-00004" ?insert-start id="INS-S-00004" date="20070123" ?,insert-end id="INS-S-00004" ?nozzle orifices, each communicating with the pressure generating chamberinsert-start id="INS-S-00005" date="20070123" ?sinsert-end id="INS-S-00005" ?delete-start id="DEL-S-00005" date="20070123" ?;delete-end id="DEL-S-00005" ?insert-start id="INS-S-00006" date="20070123" ?, andinsert-end id="INS-S-00006" ?piezoelectric vibrators formed on the elastic sheet, each of the piezoelectric vibrators having, a lower electrode formed on the elastic sheet,insert-start id="INS-S-00007" date="20070123" ?the method including forminginsert-end id="INS-S-00007" ?a piezoelectric layerdelete-start id="DEL-S-00006" date="20070123" ?formeddelete-end id="DEL-S-00006" ?on the lower electrode, andinsert-start id="INS-S-00008" date="20070123" ?forminginsert-end id="INS-S-00008" ?an upper electrodedelete-start id="DEL-S-00007" date="20070123" ?formeddelete-end id="DEL-S-00007" ?on the piezoelectric layer such that thedelete-start id="DEL-S-00008" date="20070123" ?upper electrode faces the respective pressure generating chamber, wherein thedelete-end id="DEL-S-00008" ?insert-start id="INS-S-00009" date="20070123" ?area where the lower electrode, piezoelectric layer and upper electrode overlap is located within an area defined by the pressure generating chamber in the longitudinal direction thereof. Theinsert-end id="INS-S-00009" ?upper electrodes of the piezoelectric vibrators are positioned independently of each otherdelete-start id="DEL-S-00009" date="20070123" ?;delete-end id="DEL-S-00009" ?insert-start id="INS-S-00010" date="20070123" ?andinsert-end id="INS-S-00010" ?an electrical insulator layer having windowsdelete-start id="DEL-S-00010" date="20070123" ?, wherein the electrical insulator layer coversdelete-end id="DEL-S-00010" ?insert-start id="INS-S-00011" date="20070123" ?is formed to coverinsert-end id="INS-S-00011" ?the upper electrodesdelete-start id="DEL-S-00011" date="20070123" ?;delete-end id="DEL-S-00011" ?insert-start id="INS-S-00012" date="20070123" ?,insert-end id="INS-S-00012" ?and a conductor patterndelete-start id="DEL-S-00012" date="20070123" ?connecting withdelete-end id="DEL-S-00012" ?insert-start id="INS-S-00013" date="20070123" ?is connected toinsert-end id="INS-S-00013" ?the upper electrodes via the windows of the electrical insulator layer.
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Hashizume Tsutomu
Matsuzawa Akira
Takahashi Tetsushi
Seiko Epson Corporation
Sughrue & Mion, PLLC
Tugbang A. Dexter
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