Method of manufacturing an ink jet recording head

Details Method of manufacturing an ink jet recording head Method of manufacturing an ink jet recording head

2005-06-28

2005-06-28

Arbes, Carl J. (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S830000, C029S831000, C029S832000, C347S068000

Reexamination Certificate

active

06910272

ABSTRACT:
A method of forming an ink jet recording head having a passage forming substrate made of a silicon monocrystalline substrate, having pressure generating chambers communicating with nozzle orifices, and having piezoelectric elements. Grooves, extending in the longitudinal direction, are formed on both sides of a region where the pressure generating chamber is to be formed in a surface of the passage forming substrate. Etching stop layers are provided to restrict the etching of the passage forming substrate. Pressure generating chambers are formed by etching out at least a vibration plate side of the passage forming substrate by an etching process so that the etching stop layers are exposed. Piezoelectric elements are formed by successively laminating a lower electrode, piezoelectric layer, and an upper electrode on the passage forming substrate.

REFERENCES:
patent: 5510819 (1996-04-01), Fujimoto et al.
patent: 5802686 (1998-09-01), Shimada et al.
patent: 5933167 (1999-08-01), Shimada et al.
patent: 6109738 (2000-08-01), Miyata et al.
patent: 6183070 (2001-02-01), Hashizume
patent: 01283153 (1989-11-01), None
patent: 5-286131 (1993-02-01), None
patent: 10-286960 (1998-10-01), None
patent: 2000-006395 (2000-01-01), None
patent: 2000-127382 (2000-05-01), None

Affiliated with

Also associated with

Rating

Method of manufacturing an ink jet recording head does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing an ink jet recording head, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing an ink jet recording head will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3492113