Method of manufacturing an injector plate

Details Method of manufacturing an injector plate Method of manufacturing an injector plate

2008-05-13

2008-05-13

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S896600, C347S044000, C347S047000, C427S282000, C205S075000, C204S192100, C204S192110

Reexamination Certificate

active

07370416

ABSTRACT:
A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After photolithography processing, a plurality of plugs are formed from the photo resist. A titanium layer is sputtered on the release layer and on the plurality of plugs. The plugs are removed so that the titanium layer has a plurality of openings. An injector plate fabricated from this method has the characteristics of biocompatibility with a plurality of fine-pitch openings with uniform diameters.

REFERENCES:
patent: 4675083 (1987-06-01), Bearss et al.
patent: 3-274160 (1991-12-01), None
patent: 410271 (2000-11-01), None

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