Method of manufacturing an injector for chemical vapor depositio

Details Method of manufacturing an injector for chemical vapor depositio Method of manufacturing an injector for chemical vapor depositio

1997-06-04

1999-08-10

Lusignan, Michael

Coating processes

Coating by vapor, gas, or smoke

118715, 239101, C23C 1600

Patent

active

059356472

ABSTRACT:
A method of manufacturing an injector for chemical vapor deposition (CVD) processing is provided. The method comprises the steps of selecting an elongated member of solid material having first and second ends and a gas delivery surface. At least one elongated passage for receiving a gas is formed in the elongated member and extending between the ends. At least one elongated distribution channel is formed by wire electrode discharge machining (EDM) extending from the elongated passage to the gas delivery surface for providing gas to the gas delivery surface.

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