Method of manufacturing an image detection device for radiograph

Details Method of manufacturing an image detection device for radiograph Method of manufacturing an image detection device for radiograph

1987-07-27

1988-05-24

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437241, 357 30, H01L 3118, H01L 2714

Patent

active

047466197

ABSTRACT:
In manufacturing an image detection device for radiographic purposes a matrix consisting of rows and columns of image-recording elements is formed in a substrate of semiconductor material. A protective layer of e.g. SiO.sub.2 or Si.sub.3 N.sub.4 is applied to the surface of the matrix of image recording elements. The layer is provided with grooves. The grooves extend between the rows and columns of image-recording elements. The depth of the grooves is at most equal to the thickness of the protective layer. Subsequently a layer of CsI is applied by vapor deposition on the upper side of the protective layer.

REFERENCES:
patent: 4197633 (1980-04-01), Lorenze, Jr. et al.
patent: 4290844 (1981-09-01), Rotolante et al.
patent: 4411059 (1983-10-01), Schlosser et al.
patent: 4618380 (1986-10-01), Alcorn et al.
patent: 4686761 (1987-08-01), Hacskaylo

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