Method of manufacturing an emitter base self alignment structure

Details Method of manufacturing an emitter base self alignment structure Method of manufacturing an emitter base self alignment structure

1994-03-18

1994-12-27

Hearn, Brian

Fishing, trapping, and vermin destroying

437 55, 437 36, 148DIG10, H01L 21265

Patent

active

053765630

ABSTRACT:
Using a silicon etched technique to remove an implanted base and emitter surrounding emitter-base islands, a "mesa" emitter structure can be formed. Using the structure, a self aligned P+ can be formed around emitter-base islands.

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