Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-09-03
2011-11-08
Arbes, Carl (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S825000, C029S830000, C029S832000, C361S234000
Reexamination Certificate
active
08051548
ABSTRACT:
Provided is a method of manufacturing a gas supply structure for use in an electrostatic chuck apparatus having an electrostatic chuck on the upper surface side of a metal base (1), the gas supply structure being capable of eliminating contamination due to nonuniform cooling gas jetting quantities and deposition of a thermally spraying material and the like. The method of manufacturing the gas supply structure for supplying a cooling gas supplied from the lower surface side of the metal base (1) to the back surface of a substrate (W) attracted to an upper insulating layer (6) side, through a gas supply path (3) provided on the metal base (1), the method including: prior to a step of forming a lower insulating layer (4) by thermally spraying a ceramic powder on the upper surface side of the metal base (1), a step of forming an attracting electrode (5), and a step of forming the upper insulating layer (6), a step of blocking a gas supply path outlet (3a) on the upper surface side of the metal base (1) with an adhesive (8), the adhesive containing a filler made of the same material as that of the ceramic powder that is used for forming the lower insulating layer (4); and a step of opening a hole toward the gas supply path outlet (3a) of the metal base (1) after forming the upper insulating layer (6), to thereby form a through hole (9) reaching the gas supply path (3).
REFERENCES:
patent: 5350479 (1994-09-01), Collins et al.
patent: 5644467 (1997-07-01), Steger et al.
patent: 5715132 (1998-02-01), Steger et al.
patent: 9-129717 (1997-05-01), None
patent: 2004-031665 (2004-01-01), None
patent: 2004-349664 (2004-12-01), None
Miyashita Kinya
Watanabe Yoshihiro
Arbes Carl
Birch & Stewart Kolasch & Birch, LLP
Creative Technology Corporation
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