Metal working – Piezoelectric device making
Reexamination Certificate
2008-01-22
2008-01-22
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S847000, C310S312000, C310S365000
Reexamination Certificate
active
11097888
ABSTRACT:
A manufacturing method for an electronic component includes a process of forming a lower electrode and a dummy electrode, which are electrically connected to each other, on a substrate, and a process of forming a piezoelectric thin film on the dummy electrode and the lower electrode while a predetermined bias potential is applied to the lower electrode via the dummy electrode. In this method, the piezoelectric thin film is formed on the lower electrode by stabilizing the potential of the lower electrode, thereby decreasing the surface roughness of the piezoelectric thin film. It is thus possible to manufacture an electronic component that exhibits excellent piezoelectric characteristics, in which the electromechanical coupling coefficient and the quality factor of a resonator are increased.
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Kawamura Hideki
Takeuchi Masaki
Yamada Hajime
Yoshino Yukio
Keating & Bennett LLP
Murata Manufacturing Co. Ltd.
Tugbang A. Dexter
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