Method of manufacturing an EEPROM having an erasing gate electro

Fishing – trapping – and vermin destroying

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437 48, 437 49, 437941, H01L 21265

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active

053648056

ABSTRACT:
A memory cell array is formed of a plurality of nonvolatile memory cell transistors arranged in a matrix form. The patterns of the control gate electrode and the source region of each memory cell transistor are formed in parallel and the pattern of the erasing gate electrode is formed to intersect the source region and control gate electrode patterns. A field oxide film is formed in an intersecting portion between the source region and the erasing gate electrode.

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patent: 4466081 (1984-08-01), Masuoka
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patent: 4910565 (1990-03-01), Masuoka
patent: 4924437 (1990-05-01), Paterson et al.
patent: 4967393 (1990-11-01), Yokoyama et al.

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