Method of manufacturing an antiblooming image sensor device

Details Method of manufacturing an antiblooming image sensor device Method of manufacturing an antiblooming image sensor device

1986-11-14

1987-10-06

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 53, H01L 2700, H01L 2900, H01L 3100

Patent

active

046973290

ABSTRACT:
An image sensor device comprising a semiconductor substrate having a number of surface-adjoining channel regions. The channel regions are separated from each other by surface-adjoining channel separation zones. The channel regions further adjoin an underlying semiconductor zone extending substantially parallel to the surface. The channel regions have doping concentrations which exceed that of the semiconductor zone. The semiconductor zone has a dopant concentration which exceeds the dopant concentration of the semiconductor substrate. The semiconductor zone has a varying thickness which has minima at the areas of the centers of the channel regions. In such an image sensor device, a potential distribution can be obtained which strongly suppresses blooming realized at right angles to the surface that the occurrence of blooming is strongly suppressed. The invention also relates to a method of manufacturing this image sensor device.

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