Chemistry: analytical and immunological testing – Nuclear magnetic resonance – electron spin resonance or other...
Reexamination Certificate
2010-03-18
2010-12-07
Gakh, Yelena G (Department: 1797)
Chemistry: analytical and immunological testing
Nuclear magnetic resonance, electron spin resonance or other...
C528S015000, C528S030000, C528S031000, C528S032000, C528S033000, C528S034000, C528S036000, C528S042000, C526S279000, C556S413000, C556S450000, C556S457000, C556S458000, C556S459000
Reexamination Certificate
active
07846741
ABSTRACT:
A method of manufacturing an analytical sample by a secondary ion mass spectrometry method is provided, which comprises a step of forming a separation layer over a substrate, a step of forming one of a thin film and a thin-film stack body to be analyzed over the separation layer, a step of forming an opening portion in one of the thin film and the thin-film stack body, a step of attaching a supporting body to one of a surface of the thin film and a surface of a top layer of the thin-film stack body, and a step of separating one of the thin film and the thin-film stack body from the substrate.
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Gakh Yelena G
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
Xu Robert
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