Method of manufacturing an amorphous Si electrophotographic phot

Details Method of manufacturing an amorphous Si electrophotographic phot Method of manufacturing an amorphous Si electrophotographic phot

1986-08-26

1987-05-19

Martin, Roland E.

Radiation imagery chemistry: process, composition, or product th

Electric or magnetic imagery, e.g., xerography,...

Process of making radiation-sensitive product

430 95, 427 39, G03G 5082

Patent

active

046668160

ABSTRACT:
A method of manufacturing an electrophotographic photoreceptor having an amorphous silicon layer formed as a photoconductive layer, on an electrically conductive support member. The manufacturing method includes the steps of preparing the amorphous silicon layer as the photoconductive layer by employing Si.sub.2 H.sub.6 (disilane) as a main raw material gas through a glow discharge process, and simultaneously, adding nitrogen and boron to the main raw material gas, with the unsaturated bond being stabilized by hydrogen or hydrogen and fluorine.

REFERENCES:
patent: 4460670 (1984-07-01), Ogawa et al.
patent: 4532196 (1985-07-01), Yasui et al.

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