Method of manufacturing an actuator device

Details Method of manufacturing an actuator device Method of manufacturing an actuator device

2008-01-22

2008-01-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C427S100000, C427S419200, C310S365000, C310S345000, C347S070000

Reexamination Certificate

active

11076028

ABSTRACT:
A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

REFERENCES:
patent: 5900283 (1999-05-01), Vakil et al.
patent: 6494567 (2002-12-01), Murai
patent: 5-177831 (1993-07-01), None
patent: 2001-274472 (2001-10-01), None
Ederer, Ingo., “Droplet Generator with Extraordinary High Flow Rate and Wide Operating Range”, Transducers'97, 1997 International Conference on Solid State Sensors and Actuators, Jun. 1997, pp. 809-812.

Affiliated with

Also associated with

Rating

Method of manufacturing an actuator device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing an actuator device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing an actuator device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3944583