Method of manufacturing an actuator device

Details Method of manufacturing an actuator device Method of manufacturing an actuator device

2008-01-22

2008-01-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C427S100000, C427S419200, C310S365000, C310S345000, C347S070000

Reexamination Certificate

active

07320163

ABSTRACT:
A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

REFERENCES:
patent: 5900283 (1999-05-01), Vakil et al.
patent: 6494567 (2002-12-01), Murai
patent: 5-177831 (1993-07-01), None
patent: 2001-274472 (2001-10-01), None
Ederer, Ingo., “Droplet Generator with Extraordinary High Flow Rate and Wide Operating Range”, Transducers'97, 1997 International Conference on Solid State Sensors and Actuators, Jun. 1997, pp. 809-812.

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