Method of manufacturing actuator and ink jet head

Details Method of manufacturing actuator and ink jet head Method of manufacturing actuator and ink jet head

2005-08-09

2005-08-09

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

C427S100000

Reexamination Certificate

active

06927084

ABSTRACT:
A method of manufacturing an actuator comprises the steps of bonding a piezoelectric film formed on a single crystal substrate to a diaphragm structure member and removing the single crystal substrate therefrom to manufacture the actuator. The single crystal substrate is a substrate having bonded portions where a plurality of single crystal substrates are bonded together.

REFERENCES:
patent: 2002/0076875 (2002-06-01), Wasa et al.
patent: 2002/0140320 (2002-10-01), Unno et al.
patent: 2003/0003695 (2003-01-01), Unno et al.
patent: 2003/0170381 (2003-09-01), Kashiwaya
patent: 62-213399 (1987-09-01), None
patent: 11-348285 (1999-12-01), None
patent: 2001-113712 (2001-04-01), None

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