Method of manufacturing active matrix LCD using five masks

Details Method of manufacturing active matrix LCD using five masks Method of manufacturing active matrix LCD using five masks

1995-05-30

1997-04-15

Gross, Anita Pellman

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

438701, 438 30, 349 43, G02F 1136, H01L 21265

Patent

active

056215568

ABSTRACT:
The invention provides a method for manufacturing an active matrix liquid crystal displaying device having a plurality of thin film transistors using five masks. A plurality of gate electrodes are formed using a first mask. A plurality of etch stoppers are formed over the gate electrodes using a second mask. A plurality of chain electrodes and a plurality of source electrodes are formed using a third mask. A passivation layer including via holes is formed using a fourth mask. A plurality of pixel electrodes are formed using a fifth mask.

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