Metal working – Piezoelectric device making
Patent
1996-02-09
2000-08-22
Hall, Carl E.
Metal working
Piezoelectric device making
29423, 2503383, 310321, 310324, H01L 4122
Patent
active
061052256
ABSTRACT:
A method of manufacturing a small, light, highly accurate and inexpensive thin film sensor element is disclosed. The thin film sensor element comprises a sensor holding substrate having an opening part and a multilayer film structure adhered thereon. The multilayer film structure comprises a first electrode film, a second electrode film, and a piezoelectric dielectric oxide film present between the first and second electrode films. The method of manufacturing the thin film sensor element comprises the steps of: forming the multilayer film structure by forming the first electrode film having a (100) plane orientation on a surface of an alkali halide substrate, forming the piezoelectric dielectric oxide thereon, and forming the second electrode film on the piezoelectric dielectric oxide; adhering the multilayer film structure on the surface of the sensor holding substrate having the opening part; and dissolving and removing the alkali halide substrate with water.
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Hattori Masumi
Hayashi Shigenori
Hirao Takashi
Kamada Takeshi
Takayama Ryoichi
Hall Carl E.
Matsushita Electric - Industrial Co., Ltd.
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