Method of manufacturing a thin film semiconductor device

Fishing – trapping – and vermin destroying

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437 21, 437937, 148DIG150, H01L

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active

053526147

ABSTRACT:
A semiconductor device comprises, at least, an insulative layer; a semiconductor layer provided in contact with the insulative layer; first and second electrodes provided in contact with the semiconductor layer; and a third electrode provided through the insulative layer. The semiconductor layer has a crystallite layer whose average grain diameter lies within a range from 50 to 350 .ANG. and an amorphous layer.

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patent: 5093703 (1992-03-01), Minami et al. 437

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