Method of manufacturing a thin film piezoelectric element

Details Method of manufacturing a thin film piezoelectric element Method of manufacturing a thin film piezoelectric element

2005-07-05

2005-07-05

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C310S311000, C156S239000, C156S247000

Reexamination Certificate

active

06912760

ABSTRACT:
A thin film piezoelectric element used in an actuator unit for fine positioning, and its manufacturing method, the manufacturing method including laminating two piezoelectric thin films held between electrode layers by using adhesive, and selectively removing only the second substrate in order to process the thin films remaining on the first substrate into a plurality of separated structures. After that, an insulating layer and external connecting electrode are formed to cover the exposed surface of the structure, thereby forming a plurality of thin film piezoelectric elements. Resin is applied to cover the thin film piezoelectric element, and a temporary fixing substrate is bonded thereto, and after selectively removing the first substrate, the temporary fixing substrate is separated, and the resin is removed from the piezoelectric element surface in order to separate the plurality of thin film piezoelectric elements.

REFERENCES:
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Mills et al., “Combining Multi-Layers and Composities to Increase SNR for Medical Ultrasound Transducers”, Ultrasonics Symposium, 1996, IEEE Proceedings, pp. 1509-1512, Nov. 1996.

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